The use of GLAD technology for applications in portable respiratory analyzers
PRZEGLAD ELEKTROTECHNICZNY(2022)
摘要
In this paper, the major parameters of the GLAD (Glancing Angle Deposition) technique with the utilization of the magnetron sputtering technology were presented. The GLAD technology was applied to deposition of resistive, semiconductor type gas sensors that will be applied to electronic nose (e-nose) for exhaled breath analysis in a portable device.
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关键词
GLAD technology,gas sensors,exhaled breath analysis
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