Laser-machined thin copper films on silicon as physical unclonable functions

Optics express(2023)

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摘要
Physical unclonable functions (PUFs) are receiving significant attention with the rise of cryptography and the drive towards creating unique structures for security applications and anti-counterfeiting. Specifically, nanoparticle based PUFs can produce a high degree of randomness through their size, shape, spatial distribution, chemistry, and optical properties, rendering them very difficult to replicate. However, nanoparticle PUFs typically rely on complex preparation procedures involving chemical synthesis in solution, therefore requiring dispersion, and embedding within a host medium for application. We propose laser machining of surfaces as a one-step process for the creation of complex nanoparticle based PUFs by machining 600 nm thick copper films on a silicon substrate to yield a complex spatial and chemical distribution of redeposited copper, silicon, and oxide species. The approaches and material system investigated have potential applications in silicon chip authentication.
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关键词
thin copper films,physical unclonable functions,silicon,laser-machined
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