Design and Fabrication of a P(VDF - TrFE) Based Piezoelectric Micromachined Ultrasonic Transducer with Acoustic Cavity
2022 IEEE International Ultrasonics Symposium (IUS)（2022）
Key words
Piezoelectric micromachined ultrasonic trans-ducer (pMUT),Free boundary,Acoustic resonator,Helmholtz resonance,Acoustic cavity,Double Resonance
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