Comparison of the Properties of Defect States in Nitrogen-Containing n- and p-Type Float-Zone Silicon: A Combined Deep-Level Transient Spectroscopy and Minority-Carrier Transient Spectroscopy Study

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE(2023)

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摘要
Defect states in nitrogen-containing float-zone silicon are investigated in both n- and p-type materials using both deep-level transient spectroscopy (DLTS) and minority-carrier transient spectroscopy (MCTS). This enables a mapping of the defect landscape in the entire electronic bandgap and an investigation of whether the properties of the defects depend on the semiconductor type. Two defects, the E1/E2 pair and the E4/E6 pair, are investigated, and no evidence is found for the defect properties to depend on the semiconductor type.
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关键词
deep-level transient spectroscopy,float-zone silicon,minority-carrier transient spectroscopy,nitrogen,vacancies
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