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Realization of Smooth Side Profile Using Diffusion-Controlled Wet Chemical Etching for HgTe/(Hg,Cd)Te Heterostructures

Pragya Shekhar,Kalle Bendias,Lena Fuerst,Xianhu Liang, Michael K. Gbordzoe,Tatiana Borzenko,Hartmut Buhmann,Johannes Kleinlein,Laurens W. Molenkamp

NANOTECHNOLOGY（2023）

Cited 2|Views13
Key words
heterostructure devices,nanofabrication,diffusion-controlled wet chemical etching
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