Microstructure and nanoindentation properties of high-throughput prepared Ti-Al2O3 functionally graded materials films

Yuting Wang,Chengyi Chu,Xiaolu Shi,Jiachang Bi,Gaojie Xu,Yanwei Cao,Aihua Sun

Materials Letters（2023）

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摘要

•High-throughput Ti-Al2O3 FGMs films were synthesized by a homemade magnetron sputtering.•The thickness of Ti-Al2O3 FGMs films increase with increasing the atomic ratio of Ti/Al.•The structural, morphological, hardness, and modulus values of Ti-Al2O3 FGMs films were studied.

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关键词

Functionally graded materials,Ti-Al2O3,Nanoindentation,Microstructure,Hardness

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