3D Monolithic Integration of ScAlN-based GHz MEMS Acoustic Filters on 200mm RFSOI Wafer

Y. Zhang, X. Wang,C. Liu, E. Y. Z. Woo, W. Yang, Q. Zhang, H. Lin, D. Yan,R. M. Kumarasamy, B. Chen, N. Wang, Y. Zhu

2022 International Electron Devices Meeting (IEDM)（2022）

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