Inter-Laboratory Comparison of On-Wafer Broadband 70kHz-220GHz Single-Sweep Measurements

This paper discusses methods and results of the first known inter-laboratory on-wafer measurement comparison campaign for a 70 kHz-220 GHz single-sweep measurement system. Intra- and inter-laboratory repeatability metrics are evaluated from measurements of several passive DUTs corrected by mTRL calibrations. Two evaluation approaches are discussed: the NIST calibration comparison method and the estimate of the measurement confidence interval based on the measurement reproducibility. Presented results can support cross-laboratory data comparison when the evaluation and propagation of the measurement uncertainties through the measurement chain is more difficult to apply.