Multiparameter Investigation of Diamond Plates with Optical Time- Stretch Quantitative Phase Imaging

CRYSTAL GROWTH & DESIGN(2023)

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摘要
Diamond is considered the ultimate semiconductor for its excellent physical and chemical properties, while the defects formed during the growth significantly limit the performance of diamond devices. Online monitoring and fixing is an effective method to minimize the defect density in diamond crystals. The existing methods fail to effectively investigate diamond crystals during growth due to the low frame rate or the limited variety of parameters. Here, we employ optical time-stretch quantitative phase imaging (OTS-QPI) to investigate the multiple parameters of diamond crystals synthesized in different situations. Specifically, we measure the morphological features, surface fluctuations, and refractive index distributions of diamond plates grown via chemical vapor deposition in different growth modes or via high-pressure high-temperature in doping with various concentrations of boron, respectively. The results indicate that the morphological features, surface fluctuations, and refractive index distributions acquired with OTS-QPI show an accuracy that agrees well with those captured by commercial devices, including a microscope, an optical profiler, and an ellipsometer. This work indicates that OTS-QPI can perform online measurements of multiple parameters of diamond crystals at a high speed and high accuracy, which can potentially be employed to increase the quality and yield rate of diamond devices.
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