Rapid fabrication of highly integrated and high numerical aperture chalcogenide glass microlens arrays
Infrared Physics & Technology(2023)
摘要
•A refractive type of microlens arrays (MLAs) were fabricated on commercial chalcogenide glass (As2Se3).•A facile photoresist thermal reflow and soft mold imprinting process was used to fabricate the MLAs.•MLAs with 700 × 700 array size showed excellent structure uniformity and focusing capability.•focal lengths of 6.3–8.1 µm with high numerical aperture of 0.64–0.73 (wavelength range: 3–5 μm) was achieved.
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关键词
Microlens arrays,Chalcogenide glass,Thermal reflow,Hot imprinting
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