Laser Micro/Nano-Structuring Pushes Forward Smart Sensing: Opportunities and Challenges

Post-pandemic era poses an imperative demand on progressive sensing devices whose performance largely relies on the morphologies and structures of sensing materials. Despite substantial efforts and advances that have been made in sensing materials with different micro/nanoscale dimensionalities, it is still challenging to couple micro/nano platforms with sensing materials together for the precise and scalable production of high-performance sensors toward practical application scenarios. Owing to noncontact, precise, and high-efficiency features, laser micro/nanofabrication offers a promising solution to achieve high-quality micro/nano sensors with novel functionalities in a relatively short time. Herein, this review begins with a glance over the development of micro/nano-structured sensors and briefly discusses the importance of laser micro/nanostructuring technology for micro/nano-engineering of the sensors. Next, representative processing methods are elaborated in detail from a laser-pulse-type point of view, with potential applications toward chemical, physical, and biological targets based on different sensing mechanisms summarized. Finally, the perspectives on the opportunities and challenges of laser micro/nanostructuring strategies and materials for micro/nanosensors are presented.