Knowledge Augmented Broad Learning System for Computer Vision Based Mixed-Type Defect Detection in Semiconductor Manufacturing
Robotics and Computer-Integrated Manufacturing（2022）
Key words
Semiconductor wafer fabrication,Wafer map,Surface defects,Mixed-type defects,Pattern recognition,Broad learning,Deformable convolution
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined