S2 Lamb-mode acoustic resonator with grooved micro-channels for liquids characterization

2022 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)(2022)

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摘要
This paper reports the sensitivity of second order S2 Lamb mode to liquid characteristics, in which an acoustic Lamb mode resonator LWR based on LiNbO3 ZX (LNO) is numerically studied. The sensitivity of the device to liquids loading is enhanced by incorporating distributed micro-channels in the wave path in order to increase the contact surface between the liquid and the acoustic wave. The obtained results contribute in the development of high sensitivity acoustic sensors for liquids characterization.
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关键词
S2 Lamb mode,Lamb wave resonator,distributed micro-cavities,LiNbO3 ZX,liquids sensing
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