Modification of Porous Silicon with Palladium Nanoparticles by the Method of Sonogalvanic Replacement

We present the results of investigation of the modification of porous silicon by palladium nanoparticles (PdNPs) by the method of sonogalvanic replacement in fluoride-containing dimethylsulfoxide solutions. It is shown that spherical nanoparticles of the metal, evenly distributed over the surface of the pore are formed in the course of galvanic replacement. It is shown that, as the duration of the process of sonogalvanic replacement increases, palladium nanoparticles agglomerate with formation of a thin layer on porous silicon.