Decomposition of CrN induced by laser-assisted atom probe tomography

Helene Waldl,Marcus Hans,Maximilian Schiester,Daniel Primetzhofer,Michael Burtscher,Nina Schalk,Michael Tkadletz

Ultramicroscopy（2023）

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摘要

•Variation of measurement parameters during laser-assisted APT of CrN and CrAlN.•Comparison of elemental composition determined by APT to results of RBS/ERDA.•With increasing laser pulse energy loss of N for CrN and CrAlN.•CrN decomposes into Cr via Cr2N at high laser pulse energies.

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关键词

Atom probe tomography,Laser pulse energy,CrN,CrAlN,Elemental composition

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