Effect of the Carboxyl Group Number of the Complexing Agent on Polishing Performance of Alumina Slurry in Sapphire CMP
CERAMICS INTERNATIONAL（2023）
Key words
Chemical mechanical polishing,Sapphire,Alumina abrasive,Complexing agent
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined