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Dislocation Filter Based on LT-GaAs Layers for Monolithic GaAs/Si Integration

Mikhail O. Petrushkov,Demid S. Abramkin,Eugeny A. Emelyanov,Mikhail A. Putyato,Oleg S. Komkov,Dmitrii D. Firsov,Andrey V. Vasev,Mikhail Yu. Yesin,Askhat K. Bakarov,Ivan D. Loshkarev,Anton K. Gutakovskii,Victor V. Atuchin,Valery V. Preobrazhenskii

Nanomaterials（2022）

引用 15|浏览32
关键词
low-temperature GaAs,molecular-beam epitaxy,III-V/Si integration,self-assembled quantum dots,dislocation filter
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