Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer
Nathan Nakamura,Paul Szypryt,Amber L. Dagel,Bradley K. Alpert,Douglas A. Bennett,William Bertrand Doriese,Malcolm Durkin,Joseph W. Fowler,Dylan T. Fox,Johnathon D. Gard,Ryan N. Goodner,James Zachariah Harris,Gene C. Hilton,Edward S. Jimenez,Burke L. Kernen,Kurt W. Larson,Zachary H. Levine,Daniel Mcarthur,Kelsey M. Morgan,Galen C. O'Neil,Nathan J. Ortiz,Christine G. Pappas,Carl D. Reintsema,Daniel R. Schmidt,Peter A. Schultz,Kyle R. Thompson,Joel N. Ullom,Leila Vale,Courtenay T. Vaughan,Christopher Walker,Joel C. Weber,Jason W. Wheeler,Daniel S. Swetz Sensors（2024）
Key words
X-ray nanotomography,X-ray imaging,integrated circuits,computed tomography
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