Fine Dust Mass Measurement System using oscillation frequency with SAW Sensor

In this paper, a system for measuring the mass of fine dust is proposed. When the S parameter of the SAW Sensor is checked, the resonance frequency is identified at a specific frequency When fine dust is attached to the SAW Sensor, the resonance frequency is shifted. The system detects the resonance frequency by oscillation. For SAW sensors that respond to PM 1.0 and 2.5, the oscillator oscillates at 268 MHz and 460 MHz. The proposed system has been implemented in the 130 nm BCD process.