A Terahertz Corrugated Horn Array Based on Silicon Platelets

A terahertz corrugated horn array is widely used in array receiver systems and is suitable to be made by stacked metal sheets. In this paper, we introduce the development of a broadband 2 x 2 terahertz corrugated horn array fabricated by silicon micromachining technology. The horn array is made up of 16 metalized silicon platelets with a total weight of only 4.2 grams. The measured gain of each horn element is around 16 dBi at 240 GHz with a low cross-polarization level, and the bandwidth is greater than 100 GHz with a return loss better than -15 dB.