Morphology and chemical state of platinum ions implanted into glassy carbon substrates

JOURNAL OF APPLIED PHYSICS(2022)

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摘要
Glassy carbon substrates were implanted with 100 keV platinum ions. The implanted samples were analyzed using cross-sectional transmission electron microscopy (TEM) and x-ray photoelectron spectroscopy. Ion beam sputtering significantly affected the depth profile during platinum-ion implantation. Cross-sectional TEM revealed that the implanted platinum atoms were in the amorphous state and did not aggregate. Chemical state analysis of the platinum-ion-implanted glassy carbon substrates suggested that lattice defects in the substrates owing to the platinum-ion implantation caused the platinum-carbon interaction with electron transfer from platinum to carbon.
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关键词
platinum ions,glassy carbon substrates,chemical state
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