Fabrication Methods for Photonic Crystal Surface Emitting Lasers (PCSELs) by Molecular Beam Epitaxy

Kevin James Reilly, Subhashree Seth,Fatih F Ince,Akhil Kalapala,Thomas J Rotter, Zhongue Liu,Emma Renteria,Weidong Zhou,Ganesh Balakrishnan

2022 Compound Semiconductor Week (CSW)（2022）

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摘要

Molecular Beam Epitaxy (MBE) is used for fabrication of Photonic Crystal Surface Emitting Lasers (PCSELs). Two methods of PCSEL fabrication are explored and compared: epitaxial regrowth and non-regrowth. Optically pumped and electrically injected devices are demonstrated by epitaxial regrowth.

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关键词

Molecular Beam Epitaxy,Semiconductor Laser,Photonic Crystal

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