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Low Frequency Noise of Channel-All-Around (CAA) InGaZnO Field Effect Transistors

IEEE Electron Device Letters(2022)

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摘要
In this work, we report on the results of the low-frequency ( $1/ {f}$ noise) measurements in vertical Channel-All-Around (CAA) InGaZnO field effect transistors, and the investigation of the $1/\text{f}$ noise was performed for different temperatures, bias, and channel width. A physics-based model for the $1/\text{f}$ noise is also developed. It was found that a unified fluctuation model modified by hopping transport can describe the $1/\text{f}$ noise in InGaZnO FETs. More remarkable, by fitting the $1/ {f}$ measurements data based on this model, the thermal-activated mobility was obtained, and the scattering coefficient between the oxide trapped carrier and channel carriers is extracted for the CAA InGaZnO transistor for the first time.
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关键词
InGaZnO (IGZO),thin film transistors (TFTs),low frequency noise
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