Characterization of 3-port SAW diplexers using 2-port VNA measurements

A.C. Bunea,D. Neculoiu, M.A. Dinescu

2022 International Semiconductor Conference (CAS)(2022)

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摘要
A simple approach to the on-wafer characterization of 3-port surface acoustic wave (SAW) diplexers using S- to Z- parameter conversion is proposed. The concept is first tested on a simple power divider model. The model is based on ideal transmission line elements and open circuit blocks. The results are excellent with total S-parameter errors below 10 −9 • The technique is then successfully applied to X-band delay line type 3-port SAW circuits connected using 50 Ohm characteristic impedance coplanar waveguide (CPW) transmission lines.
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关键词
diplexer,S-parameters,scandium alluminum nitride,surface acoustic wave,Z-parameters
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