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Characteristics of (Mo-Ta-w)-c and (Nb-Ta-w)-c Refractory Multi-Principal Element Carbide Thin Films by Non-Reactive Direct Current Magnetron Co-Sputtering

Yiyong Zhang,Zhibin Zhang,Zhiyuan Jing,Haoxu Wang,Wen Yao,Xiubing Liang

JOURNAL OF ALLOYS AND COMPOUNDS（2023）

Cited 5|Views15
Key words
Carbide thin films,Non -reactive magnetron co -sputtering,Microstructure,Mechanical properties,Corrosion resistance,Optical properties
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