Epitaxy of wafer-scale bilayer MoS2 thin film for P-N diodes

Matter(2022)

引用 0|浏览4
暂无评分
摘要
The large-scale fabrication of P-N diodes based on atomically thin two-dimensional transition-metal dichalcogenide (2D TMD) has po-tential application in integrated circuit of semiconductor industry. However, the mobility of emerging monolayer TMD such as MoS2 was severely degraded by phonon scattering, and fabrication of P-type field effective transistors (FETs) through controllable doping still remains challenging. Recently, two works published in Nature have reported uniform nucleation growth of bilayer MoS2 thin film on c-plane sapphire and fabrication of P-type FETs by evaporating high work function metals as device electrodes. The reported two works provide new strategies to optimize the growth of wafer-scale TMD thin film and fabrication of P-type FETs, which may accelerate the development of future electronics.
更多
查看译文
关键词
mos2 thin film,diodes,wafer-scale
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要