Radiation effects on He+- and H+-implantation for ion slicing of rutile titanium dioxide thin film

Yujie Ma, Senhua Lin,Yizhi Qiu,Xinzhi Zheng,Mingyoung Yu,Bingxi Xiang,Fang Xu,Fei Lu,Cangtao Zhou,Shuangchen Ruan

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2022）

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摘要

•The thin film exfoliation of He+- and H+- implanted r-TiO2 were investigated.•The lattice damage properties in He+ and H+ -implanted r-TiO2 were analyzed.•The implanted H+-ions tend to diffuse out of r-TiO2 sample surface during annealing.

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关键词

Radiation effects,Rutile TiO2 thin film,H+ and He+ implantation,Lattice damage,Layer splitting

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