Mechanical properties of thermally grown submicron oxide layers on a nickel-based superalloy

•The morphology and mechanical properties of a submicron oxide scale formed on a nickel-based superalloy were evaluated.•The oxide consisted of nanoparticles and nano-whiskers followed by layers of rutile, chromia and alumina.•From in situ micromechanical tests the Poisson’s ratio and Young’s modulus were found to be respectively 0.29, and 259 GPa.•Depth-resolved residual stress profiles with nanoscale resolution were obtained from ring-core FIB-DIC tests.•The magnitude of compressive stress in the oxide was correlated to the oxide scale thickness.