Multiscale Simulation of Physical Vapor Deposition

•The whole process of magnetron sputtering is calculated and simulated. The fractal theory is used to explain the quality of coating film.•Titanium polypropylene film was prepared by magnetron sputtering instrument.•The COMSOL simulation and Matlab calculation are carried out, and the experimental results are combined with the simulation results.•The corresponding relation between target base distance and film thickness is obtained through calculation and experiment.