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Deep Sub-Micron Josephson Junctions Fabricated by Using Maskless Direct Writing on 4-Inch Silicon Wafer

Zhi Ni,Guofeng Zhang,Wentao Wu, Yongliang Wang,Liangliang Rong,Jun Wu,Longqing Qiu,Shulin Zhang,Hui Dong,Xiaoming Xie

Physica C Superconductivity（2022）

Cited 1|Views26
Key words
Josephson junction,Deep sub -micron,Maskless,Direct writing lithography
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