Fast full-field 3D surface profilometry by heterodyne interferometry of a femtosecond laser
2022 Conference on Lasers and Electro-Optics (CLEO)(2022)
摘要
We present an interferometer of a femtosecond laser for fast full-field 3D surface profilometry. The heterodyne interference is introduced to reduce the requirement of camera’s frame rate, thus achieving an enhancement on the measured speed. This method has experimentally demonstrated to increase the measurement speed several fold without significant loss of precision.
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