1D Beam Steering by a Waveguide-Integrated MEMS Cantilever in the Visible Spectrum

Saeed Sharif Azadeh,Jason C. C. Mak,Hong Chen,Xianshu Luo,Fu-Der Chen,Hongyao Chua,Guo Qiang Lo,Wesley D. Sacher,Joyce K. S. Poon

2022 Conference on Lasers and Electro-Optics (CLEO)（2022）

引用 1|浏览18

暂无评分

摘要

We demonstrate one-dimensional beam steering in the visible spectrum using an electro-thermally actuated waveguide-integrated MEMS cantilever. A 24° scan range, 29 mW power consumption, and resonant scan rate of 4.74kHz were achieved at a fixed wavelength.

查看译文

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要