Silicon Nitride Process for Mode-Orthogonal MEMS-Tunable Photonic Devices

Nathnael S. Abebe,Sunil Pai,Payton Broaddus, Rebecca L. Hwang,Yu Miao,Olav Solgaard

2022 Conference on Lasers and Electro-Optics (CLEO)（2022）

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摘要

We report a silicon-photonics process for MEMS-tunable phase shifters that leverages orthogonal optical modes. A phase shifter with -0.63dB insertion loss and π phase shift and a preliminary tunable directional coupler are demonstrated.

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