Fabrication and Characterization of High Permittivity Solid Immersion Lenses for Terahertz Microscopy Applications

Quentin Chapdelaine,Kathirvel Nallappan,Yang Cao,Guofu Xu,Nikita Chernomyrdin,Hichem Guerboukha, Kirill Zaitsev,Maksim Skorobogatiy

2022 IEEE Photonics Society Summer Topicals Meeting Series (SUM)（2022）

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摘要

THz microscopy is attracting a lot of attention due to its potential applications in medicine, semi-conductor analysis, etc. In this work, we present the fabrication and characterization of high permittivity solid immersion lens and demonstrate its super-resolution abilities in the THz spectral range.

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关键词

Terahertz imaging,super-resolution,solid immersion lens,titanium dioxide

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