A Modified H2 Emissions Circuit Model for BAW Devices

Pen-Li Yu,Dong Shim, Christopher Kirkendall,Siamak Fouladi

2022 IEEE MTT-S International Conference on Microwave Acoustics and Mechanics (IC-MAM)（2022）

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摘要

We propose a modified extended-Butterworth-Van-Dyke (mEBVD) circuit to model an arbitrarily shaped BAW device’s second harmonic emissions (H2). The circuit is synthesized from the rational approximation of the resonator’s admittance. The model represents each lateral mode with an RLC circuit and a current-controlled-current source (CCCS). We validate the model using 3D FEM simulations and experimental measurements.

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关键词

H2 emission,second harmonic emissions,BAW resonator,FBAR,BVD,EBVD,lateral modes,spurious modes

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