Comparison of Saturator Designs for Delivery of Low-Volatility Liquid Precursors

•Saturator designs were compared for delivery of low-volatility precursors.•The performance of a bubbler and flow over vessel were characterized.•Mass carryover from each vessel was measured with a non-dispersive gas analyzer.•The impact of various process conditions on mass carryover was examined and modeled.•The bubbler delivered more precursor more efficiently than the flow over vessel.