Silicon Nitride Ring Resonators Based on Subwavelength Grating Metamaterials

Cameron M. Naraine,Jocelyn N. Westwood-Bachman,Cameron Horvath,Mirwais Aktary,Andrew P. Knights,Jens H. Schmid,Pavel Cheben,Jonathan D. B. Bradley

Conference on Lasers and Electro-Optics（2022）

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摘要

We demonstrate subwavelength grating metamaterial ring resonators on a silicon nitride platform. We report an internal Q factor of 2.11˖10 5 and 1.48 dB/cm propagation loss at 1540 nm wavelength. We discuss the potential of these novel devices for applications in evanescent field sensing and light amplification.

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关键词

silicon nitride ring resonators,subwavelength grating metamaterials,metamaterial ring resonators,silicon nitride platform,internal Q factor,propagation loss,1540 nm wavelength,loss 105.0 dB,wavelength 1540.0 nm

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