Flat Optics Optical Function and Fabrication Process Characterization using Quadri-Wave Lateral Shearing Interferometry based Wavefront Sensor
OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT)（2021）
摘要
Wavefront sensor based on Quadriwave Lateral Shearing Interferometry is used to fully characterize flat optics and metasurfaces. It measures both the global optical function (phase shaping, MTF, PSF, …) but also the metastructure arrangement. © 2021 Valentin Genuer, Romain Laberdesque, Benoit Wattellier
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