Unveiling a geometric angstrom era of transistors: Physical gate length scaled down to one atom thickness

Microelectronic Engineering(2022)

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摘要
The world shortest gate length transistor was born using MoS2 as channel and the edge of graphene as gate, exhibiting on/off ratios up to 1.02 × 105 and subthreshold swing values down to 117mVdec−1. This work unveils that the geometric Angstrom era of transistors has come into reality. However, there is still a long way to go for the sub-1 nm- Lg transistors form the lab to the fab.
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关键词
Angstrom era,Scaling limits of transistors,2D materials
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