Nanosized Modification of the Silicon Surface by the Method of Focused Ion BeamsKots I. N.,Polyakova V. V.,Morozova Yu. V.,Kolomiytsev A. S.,Klimin V. S.,Ageev O. A.Russian Microelectronics（2022）引用 3|浏览3AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
