Body Force Based Droplet Ejection by GHz Acoustic Micro-Transducer

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)(2023)

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摘要
This paper proposes a novel nozzle-free acoustic droplet ejection system based on GHz acoustic MEMS transducer. A strong body force could be generated to eject droplets when the GHz pulse signal is applied to the transducer. Compared with other acoustic ejection methods, the body force-based method generates focused radiation pressure without additional acoustic focus structures. Given its small size, nozzle-free, high acoustic radiation pressure and compatibility with complementary metal oxide semiconductor (CMOS) fabrication, the acoustic droplet ejection system has great potential in ink-jet printing, bioprinting and drug delivery applications.
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关键词
Acoustic droplet ejection, GHz acoustic transducer, nozzle-free, body force, printing
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