Machine learning enhanced in-situ electron beam lithography of photonic nanostructures

Marvin Schlischka,Ching-Wen Shih, Jan Donges, Monica Pengerla,Imad Limame,Johannes Schall,Lucas Bremer,Sven Rodt,Stephan Reitzenstein

Nanoscale（2022）

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摘要

We report on the deterministic fabrication of quantum devices aided by machine-learning-based image processing. The goal of the work is to demonstrate that pattern recognition based on specifically trained machine...

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electron beam lithography,photonic nanostructures,machine learning

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