Cmos spad imager array for wide radiation temperature sensing and thermal imaging

IEEE Sensors Journal(2022)

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摘要
We have demonstrated a wide radiation temperature measurement by using a single-photon avalanche diode (SPAD) image array that is analogous to a silicon photomultiplier with a time-gating technique and an adjustable summed output. The detection temperature window ranging from 280 degrees C to 1050 degrees C can be achieved with a noise equivalent temperature difference (NETD) value of below 1 degrees C. The thermal image with a high detection rate up to 1680 Hz is obtained at the same detection temperature as a commercial CMOS thermal camera. We further demonstrate a thermal image with a spatial resolution of 80 mu m .
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关键词
Radiometry,single-photon avalanche diode (SPAD)
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