Interaction of molecular oxygen ions with copper surface: features of the energy spectra of sputtered and backscattered ions

An experimental study on the energy spectra of ions emitted from the surface of a polycrystalline Cu target under the bombardment by 2 keV O2+ molecular ions was carried out. Sputtered atomic ions Cu+ and O+ were prevailed among the positively charged secondary ions, and among the negative ions, in addition to sputtered ions Cu-, CuO2-, O-, and O2-, intense elastically and inelastically backscattered O-, and O2+ ions were revealed. Keywords: energy spectra, ion sputtering, backscattered ions, charge exchange.