Ultra-Broadband and Low-Loss Silicon-Based Power Splitter Based on Subwavelength Grating-Assisted Multimode Interference Structure

High-performance and compact power splitters are fundamental components in on-chip photonic integrated circuits (PICs). We propose a silicon-based power splitter based on a subwavelength grating (SWG)-assisted multimode interference (MMI) structure. To shorten the device size and enhance the device performance, an inverse-tapered SWG is embedded in the central region of the MMI and two rows of uniform SWG are embedded on both sides, together with two right-angled cutting structures on the input side. According to the results, the MMI length was obviously reduced to 3.2 mu m (5.2 mu m for conventional MMI structure under the same waveguide width), while the insertion loss (IL) and reflection loss were 0.08 dB and <-35 dB, respectively. Moreover, the allowable working bandwidth could be extended to 560 nm by keeping IL <0.6 dB, covering the whole optical communication band. On the basis of these features, we believe that such a power splitter is very promising for building on-chip large-scale PICs where power splitting is indispensable.