Ultra-precise surface structuring in nanometer scale New approaches in diamond turning for manufacturing of asymmetric structures

VAKUUM IN FORSCHUNG UND PRAXIS(2022)

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摘要
Manufacturing of large scale functionalized and structured surfaces require special production processes and machines. Important criteria for those surfaces are the realized surface roughness and contour accuracy. Typical structures for optical applications with a high quality demand are V-grooves, pyramidal and fresnel geometries. The initial mastering process is decisive for the quality in the consecutive replication processes like thermal- or UV-Nanoimprint. Ultra-precision diamond turning can be seen as one efficient methodology for the creation of large area structured drums with a high surface quality.
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