Highly-confined, low-loss visible photonics using foundry-fabricated Silicon Nitride circuits

Vijay Soorya Shunmuga Sundaram,Evan Manfreda-Schulz,Todd H. Stievater,Nathan F. Tyndall,Thomas Palone,Venkatesh Deenadayalan,Christopher Tison,Zachary Smith,David Hucul,Gregory A. Howland,Michael L. Fanto,Stefan F. Preble

Conference on Lasers and Electro-Optics（2022）

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摘要

In this paper, we present CMOS-foundry-fabricated silicon nitride photonic structures at barium emission wavelengths - 493nm and 650nm. High mode-confinement, low propagation losses, and inverse-designed 3dB splitters are demonstrated.

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关键词

Silicon Nitride circuits,CMOS-foundry-fabricated silicon nitride photonic structures,barium emission wavelengths - 493nm,high mode-confinement,low propagation losses,highly-confined,low-loss visible photonics,size 650.0 nm,size 493.0 nm,noise figure 3.0 dB

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