Wafer-Scale-Compatible Substrate Undercut for Ultra-Efficient SOI Thermal Phase Shifters

Matthew van Niekerk, Venkatesh Deenadalayan,Anthony Rizzo,Gerald Leake,Daniel Coleman,Christopher C. Tison,Michael L. Fanto,Keren Bergman,Stefan Preble

Conference on Lasers and Electro-Optics（2022）

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摘要

We present a thermally isolated phase shifter through undercutting the silicon waveguide and resistive heaters, yielding a low-power (Pπ = 1.2 mW) and low-crosstalk tunable Mach-Zehnder interferometer.

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关键词

wafer-scale-compatible substrate undercut,ultra-efficient SOI thermal phase shifters,thermally isolated phase,silicon waveguide,resistive heaters,power 1.2 mW

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