Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance

Sam Ahmadzadeh,Des Gibson,Lewis Fleming,David Hutson, Greg Mcgann,Shigeng Song, Ameen Belke,Allan James, Stephen Wells, Alan Forsyth,Suzanne Bruckshaw

Optical Interference Coatings Conference (OIC) 2022（2022）

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摘要

Absorber optical coating with maximised broadband infrared absorptance is deposited using pulsed DC sputter deposited hydrogenated carbon. Application to MOEMS CMOS thermopile device is demonstrated with thermopile device output increased 220%.

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关键词

cmos thermopile performance,carbon multilayer,absorber,moems

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