Assess the performance of microstructural and optoelectronic properties of dual porous silicon decorated by ZrO 2 /Al 2 O 3 nanoparticles

Abstract Nanoparticles of Al2O3 and ZrO2 were deposited in dual Silicon nanopores by chemical vapor deposition (CVD).This work presents a study of the integration effect of the alumina nanoparticle on morphological and opto-electronic properties of a porous Sidp/ZrO2 composite. Various techniques have been used such as scanning electron microscope, energy dispersion X-ray spectroscopy,X-ray diffraction, spectroscopic ellipsommetry and impedance analyzer techniques for coroled between morpho-structural and opto-electronic properties. After correlating the opto microstructural and electrical properties, we find this process simple, easy and efficient to produce high quality Sidp/ZrO2/Al2O3 thin films for optoelectronic applications.